10th International symposium on Negative Ions, Beams and Sources - NIBS'26

Session

S2: Chairperson - Klaus Becker, AMAT

Sep 21, 2026, 10:55 AM

Conference Room (Prestige Lakeside Resort Nelson)

86. Applications, Developments, and Recent Work with O- Beams

Dr Noel Smith (Oregon Physics)

9/21/26, 10:55 AM

Invited

Negative oxygen ion (O⁻) focused ion beams occupy a central role in secondary ion mass spectrometry (SIMS), enabling high-sensitivity analysis of electropositive elements through the ion yield enhancing mechanisms of oxygen bombardment. The implantation of oxygen both increases the ionization probability during the collision cascade and reduces the probability of secondary ion neutralization...

106. Aspects of negative ions in Microwave PECVD Plasmas for Diamond Thin Film Deposition

Prof. Michael Bradley (University of Saskatchewan)

9/21/26, 11:20 AM

Invited

Microwave Plasma Enhanced Chemical Vapour Deposition (PECVD) is a versatile technique for thin film deposition. Diamond thin films grown using Microwave PECVD have a wide range of high-tech applications including transparent windows, quantum applications of the diamond NV- centre, thermal transport layers for semiconductor devices, and nuclear battery applications. Our group has been...

100. First Results of a Novel Resonant Antenna Dual-Polarity Focused Ion Beam Source

Felicien Filleul (EPFL)

9/21/26, 11:45 AM

Contributed Oral

Advances in focused ion beam (FIB) sources are key to expand the analytical capabilities of secondary ion mass spectrometers (SIMS) while driving down their operational costs, enabling new science in fields ranging from geology, biology, medicine to space sciences [1].

A novel dual-polarity ion source is being developed to equip SIMS with a high-performance, reliable and affordable...